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Institute Info

Facilities

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BUILDING

CMOS Cleanroom

Building : Basement 1, ground 2 stories

Size : 2,109㎡ (Cleanroom 836㎡)

investment : 360M$

System sealing type 3 stories Cleanrooms

MEMS & Sensor Cleanroom

Cleanroom(Class 100~1000) : 430㎡

- Cleanroom Application : MEMS, Sensor & display

Measurement(Semi-Cleanroom) : 106㎡

- equiqment : I-V, Cap, SEM, Hall etc.

Semiconductor & Measurement
NO. NAMES
Process 65 E-beam litho., Stepper, Ion implanter, PIII, LPCVD, Metal Sputter, PR Track, LP TEOS, etcher(dielectric/poly/metal), thermal furnace, ALD, MOCVD, etc.
Measure & analysis 25 FE-SEM, AFM, CD-SEM, Alpha-step, ellipsometer, AES, PL, 110GHz Network analyzer, semiauto-probe station, etc.
Software 20 Work station, Silvaco tool(Silvaco donation), IC-CAP, ADS(Agilent donation), etc.
Cleanroom Environment
ROOM Class(ea/ft3) Temperature(℃) Humidity(%) Illuminance(LUX) Area(㎡)
YELLOW ROOM 100 22±1 45±3 600 66
CLEAN ROOM 1,000 22±1 45±3 500 185
SERVICE AREA 100,000 22±3 45±5 500 277
LOCKER ROOM 100,000 22±3 45±5 500 -
Normal ROOM N/S 22±3 - 300 -

1)CLEAN ROOM Basic Specification U.S. Federal Standard
2)CLASS : 0.3m or more

Institute of semicondctor Fusion Technology, IT-3B/D 203, Kyungpook National University,
Daehak-ro 80 (Sangyeok-dong), Buk-gu, Daegu

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