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Institute Info

Equipment Building Status

HOME Institute Info Equipment Building Status

▶ Total 83types, 150 units (total building cost: 13billon Korean won)
Section PHOTO DIFFUSION MEASURE ETCH
Equipment E-beam litho. System 6” furnace 1(Dry Ox, Wet Ox, Metal alloy) FE-SEM Cluster etcher
E-beam wet station 6” furnace 2 (N+ anneal, P+ anneal) AES Oxide/Nitride etcher
i-line stepper 1 High temp. Anneal furnace PL poly-Si etcher
i-line stepper 2 LPCVD AFM Metal etcher
Midas mask aligner TEOS LPCVD Hall measurement PR asher
PR Track D-poly LPCVD 4-point probe ICP-RIE
PR wet station Activation RTP 110GHz Network analyzer ICP etcher
MA6 mask aligner Silicide RTP Dynamic IV analyzer(DIVA) RIE
PR wet station 4” furnace 1 4156C IV meter Deep Si etcher
PR Coater 1 4” furnace 2 4155A IV meter Wet station (Metal)
PR Coater 2 4” furnace 3 4280A CV meter Wet station (piece)
PR wet station Excimer Laser system 4184A LCR meter Wet station (wafer)
Bake Oven 1 Manual probe station 1, 2 Wet station (Pre-thermal)
Bake Oven 2 STA 1, 2, 3 Wet station (RCA)
Hot plate(soft bake) Analog signal generator Wet station (TMAH)
Hot plate(hard bake) Data generator SRD
Nanospec SRD (pre-thermal)
Ellipsometer SRD (RCA)
Highmac microscope SRD (TMAH)
Visual microscope
CD-SEM
Microscope
FPMS
Section CVD IMPLANTER PACKAGING METAL
Equipment MOCDV (S) Ion Implanter Dicing Saw Metal Sputter
PECVD Pulsed PLAD Spin dryer Dielectric Sputter
Cluster PECVD UV curing Evaporator(ERC)
Tape Mounter Evaporator
Polisher OLED Production
Expander Metal ALD
Wire bonder Dielectric ALD
Institute of semicondctor Fusion Technology, IT-3B/D 203, Kyungpook National University,
Daehak-ro 80 (Sangyeok-dong), Buk-gu, Daegu

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